Semiconductor memory device

ABSTRACT

A semiconductor memory device includes a first memory cell which is capable of being set to any one of at least four threshold voltages, a first bit line, a word line, and a first sense amplifier which is connected to the first bit line. The first sense amplifier applies a charging voltage to the first bit line in a first verification operation in which a first voltage is applied to the word line, does not apply the charging voltage to the first bit line in a second verification operation in which a second voltage higher than the first voltage is applied to the word line, and applies the charging voltage to the first bit line BL in a third verification operation in which a third voltage higher than the second voltage is applied to the word line.

CROSS-REFERENCE TO RELATED APPLICATION

This application is based upon and claims the benefit of priority fromJapanese Patent Application No. 2016-025096, filed Feb. 12, 2016, theentire contents of which are incorporated herein by reference.

FIELD

Embodiments described herein relate generally to a semiconductor memorydevice.

BACKGROUND

NAND-type flash memories are known as semiconductor memory devices.

DESCRIPTION OF THE DRAWINGS

FIG. 1 is a block diagram of a semiconductor memory device according toa first embodiment.

FIG. 2 is a circuit diagram of a memory cell array included in thesemiconductor memory device according to the first embodiment.

FIG. 3 is a cross-sectional diagram of the memory cell array included inthe semiconductor memory device according to the first embodiment.

FIG. 4 is a block diagram of a sense amplifier included in thesemiconductor memory device according to the first embodiment.

FIG. 5 is a circuit diagram of a sense amplifier unit included in thesemiconductor memory device according to the first embodiment.

FIGS. 6A and 6B are diagrams showing a threshold voltage distribution ofa memory cell transistor included in the semiconductor memory deviceaccording to the first embodiment.

FIG. 7 is a flow diagram showing an AND operation in the sense amplifierunit included in the semiconductor memory device according to the firstembodiment.

FIG. 8 is a flow diagram showing an OR operation in the sense amplifierunit included in the semiconductor memory device according to the firstembodiment.

FIG. 9 is a flow chart showing a writing operation of the semiconductormemory device according to the first embodiment.

FIG. 10 is a timing chart showing a potential of each wiring in awriting operation of the semiconductor memory device according to thefirst embodiment.

FIG. 11 is a diagram showing data held in a latch circuit in averification operation of the semiconductor memory device according tothe first embodiment.

FIG. 12 is a timing chart showing a potential of each wiring during averification operation of the semiconductor memory device according tothe first embodiment.

FIG. 13 is a diagram showing a relationship between the number of loopsand a verification operation in a writing operation of the semiconductormemory device according to the first embodiment.

FIG. 14 is a diagram showing a relationship between the number of loopsand a bit line voltage in a writing operation of the semiconductormemory device according to the first embodiment.

FIG. 15 is a timing chart showing voltages of a selected word line, bitlines, and a signal STB in a writing operation of the semiconductormemory device according to the first embodiment.

FIG. 16 is a diagram showing data held in a latch circuit in a writingoperation of the semiconductor memory device according to the firstembodiment.

FIG. 17 is a diagram showing data held in a latch circuit in a writingoperation of the semiconductor memory device according to the firstembodiment.

FIG. 18 is a diagram showing data held in a latch circuit in a writingoperation of the semiconductor memory device according to the firstembodiment.

FIG. 19 is a diagram showing data held in a latch circuit in averification operation of a semiconductor memory device according to asecond embodiment.

FIG. 20 is a timing chart showing voltages of a selected word line, bitlines, and a signal STB in a writing operation of the semiconductormemory device according to the second embodiment.

DETAILED DESCRIPTION

A semiconductor memory device capable of improving processing capabilityis provided.

In general, according to an embodiment, a semiconductor memory deviceincludes a first memory cell which is capable of being set to any one ofat least four threshold voltages, a first bit line which is connected tothe first memory cell, a word line which is connected to a gate of thefirst memory cell, and a first sense amplifier which is connected to thefirst bit line. A verification operation of verifying the thresholdvoltage of the first memory cell is performed after a programmingoperation of writing data in the first memory cell is performed. In afirst verification operation in which a first voltage is applied to theword line, the first sense amplifier applies a charging voltage to thefirst bit line. In a second verification operation in which a secondvoltage higher than the first voltage is applied to the word line, thefirst sense amplifier does not apply the charging voltage to the firstbit line. In a third verification operation in which a third voltagehigher than the second voltage is applied to the word line, the firstsense amplifier applies the charging voltage to the first bit line.

It is possible to provide a semiconductor memory device capable ofimproving processing capability through the embodiments described below.Meanwhile, the embodiments are not limited to the configurationsdescribed below, and can be modified in various ways.

Hereinafter, embodiments will be described with reference to theaccompanying drawings. In the description, common portions are denotedby common reference numerals and signs throughout the drawings.

1. First Embodiment

A semiconductor memory device according to a first embodiment will bedescribed below. Hereinafter, as an example of the semiconductor memorydevice, a three-dimensional stacked NAND-type flash memory in which amemory cell transistor is three-dimensionally stacked on a semiconductorsubstrate will be described.

1.1 Configuration

1.1.1 Overall Configuration of Semiconductor Memory Device

First, the overall configuration of a semiconductor memory deviceaccording to this embodiment will be described with reference to FIG. 1.FIG. 1 is a block diagram of a NAND-type flash memory according to thisembodiment.

As shown in the drawing, a NAND-type flash memory 1 includes a memorycell array 2, a row decoder 3, a sense amplifier 4, and a controlcircuit 5.

The memory cell array 2 includes a plurality of blocks BLK (BLK0, BLK1,BLK2, . . . ) including nonvolatile memory cell transistors arranged ina matrix configuration. Each of the blocks BLK includes, for example,four string units SU (SU0 to SU3). In addition, each of the string unitsSU includes a plurality of NAND strings 6. The number of blocks in thememory cell array 2 and the number of string units in the block arearbitrary. The memory cell array 2 will be described later in detail.

The row decoder 3 decodes a row address, selects one of the blocks BLKon the basis of a result of the decoding, and selects one of the stringunits SU. In addition, a necessary voltage is output to the block BLK.The row address is output from a controller that controls, for example,the NAND-type flash memory 1.

The sense amplifier 4 senses data which is read out from the memory cellarray 2 during a data read-out operation. In addition, the read-out datais output to the controller. Write data received from an externalcontroller is transmitted to the memory cell array 2 during a datawriting operation.

The control circuit 5 controls the operation of the entire NAND-typeflash memory 1.

1.1.2 Configuration of Block BLK

Next, a configuration of the above-mentioned block BLK will be describedwith reference to FIG. 2. As described above, the block BLK includes,for example, four string units SU, and each of the string units SUincludes a plurality of NAND strings 6.

As shown in the drawing, each of the NAND strings 6 includes, forexample, eight memory cell transistors MT (MT0 to MT7) and selectiontransistors ST1 and ST2. The memory cell transistor MT includes acontrol gate and a charge storage layer, and holds data in a nonvolatilemanner. In addition, the memory cell transistors MT are connected toeach other in series between a source of the selection transistor ST1and a drain of the selection transistor ST2.

A gate of each selection transistor ST1 in the string units SU0 to SU3is connected to a respective one of select-gate lines SGD0 to SGD3. Onthe other hand, gates of the selection transistors ST2 in the stringunits SU0 to SU3 are connected to, for example, a select-gate line SGSin common. Alternatively, the string units may be connected to differentsets of select-gate lines SGS0 to SGS3. In addition, control gates ofthe memory cell transistors MT0 to MT7 within the same block BLK areconnected to word lines WL0 to WL7, respectively.

In addition, drains of the selection transistors ST1 of the NAND strings6 in the string unit SU are connected to different bit lines BL (BL0 toBL(L−1), where L is a natural number of 2 or greater). In addition, thebit line BL is connected in common to one NAND string 6 within each ofthe string units SU across the plurality of blocks BLK. Further, sourcesof the plurality of selection transistors ST2 are connected to a sourceline SL in common.

In other words, the string unit SU is an integrated product of the NANDstrings 6 that are connected to different bit lines BL and are connectedto the same select-gate line SGD. In addition, the block BLK is anintegrated product of the plurality of string units SU sharing the wordlines WL. In addition, the memory cell array 2 is an integrated productof the plurality of blocks BLK sharing the bit lines BL.

FIG. 3 is a cross-sectional diagram of a partial region of the blockBLK. As shown in the drawing, the plurality of NAND strings 6 are formedon a p-type well region 10. That is, for example, four wiring layers 11functioning as the select-gate line SGS, eight wiring layers 12functioning as the word lines WL0 to WL7, and, for example, four wiringlayers 13 functioning as the select-gate line SGD are sequentiallystacked on the well region 10. An insulating film not shown in thedrawing is formed between the stacked wiring layers.

In addition, a pillar-shaped conductor 14 passing through wiring layers13, 12, and 11 and reaching the well region 10 is formed. A gateinsulating film 15, a charge storage layer (an insulating film or aconductive film) 16, and a block insulating film 17 are sequentiallyformed on a side surface of the conductor 14, and the memory celltransistors MT and the selection transistors ST1 and ST2 are formed bythese sequentially formed films. The conductor 14 functions as a currentpath of the NAND string 6, and serves as a region in which a channel ofeach transistor is formed. In addition, an upper end of the conductor 14is connected to a metal wiring layer 18 functioning as the bit line BL.

An n+ type impurity diffusion layer 19 is formed in the surface regionof the well region 10. A contact plug 20 is formed on the diffusionlayer 19, and the contact plug 20 is connected to a metal wiring layer21 functioning as a source line SL. Further, a p+ type impuritydiffusion layer 22 is formed in the surface region of the well region10. A contact plug 23 is formed on the diffusion layer 22, and thecontact plug 23 is connected to a metal wiring layer 24 functioning as awell wiring CPWELL. The well wiring CPWELL is a wiring for applying apotential to the conductor 14 through the well region 10.

A plurality of configurations described above are arrayed in a depthdirection of the sheet of FIG. 3, and the string unit SU is formed by aset of plurality of NAND strings 6 arranged in the depth direction.

Meanwhile, the erasing of data can be performed in units of the blocksBLK or in units smaller than the blocks BLK. An erasure method isdisclosed in, for example, U.S. patent application Ser. No. 13/235,389,filed on Sep. 18, 2011, which is entitled “NONVOLATILE SEMICONDUCTORMEMORY DEVICE,” U.S. patent application Ser. No. 12/694,690, filed onJan. 27, 2010, which is entitled “NON-VOLATILE SEMICONDUCTOR STORAGEDEVICE,” and U.S. patent application Ser. No. 13/483,610, filed on May30, 2012, which is entitled “NONVOLATILE SEMICONDUCTOR MEMORY DEVICE ANDDATA ERASE METHOD THEREOF.” All of these patent applications areincorporated by reference herein in their entireties.

Further, the memory cell array 2 may have any other configuration, suchas the ones disclosed in U.S. patent application Ser. No. 12/407,403,filed on Mar. 19, 2009, which is entitled “THREE-DIMENSIONAL LAMINATEDNONVOLATILE SEMICONDUCTOR MEMORY,” U.S. patent application Ser. No.12/406,524, filed on Mar. 18, 2009, which is entitled “THREE-DIMENSIONALSTACKED NONVOLATILE SEMICONDUCTOR MEMORY,” U.S. patent application Ser.No. 12/679,991, filed on Mar. 25, 2010, which is entitled “NON-VOLATILESEMICONDUCTOR STORAGE DEVICE AND METHOD OF MANUFACTURING THE SAME,” andU.S. patent application Ser. No. 12/532,030, filed on Mar. 23, 2009,which is entitled “SEMICONDUCTOR MEMORY AND METHOD FOR MANUFACTURINGSAME.” All of these patent applications are incorporated by referenceherein in their entireties.

1.1.3 Configuration of Sense Amplifier

Next, a configuration of the sense amplifier 4 will be described withreference to FIG. 4.

As shown in the drawing, the sense amplifier 4 includes a plurality ofsense amplifier units SAU and a plurality of latch circuits XDL.

For example, the sense amplifier unit SAU is provided for each bit lineBL, senses data which is read out to the corresponding bit line BL, andtransmits write data to the corresponding bit line BL. For example,sixteen sense amplifier units SAU are connected to one bus DBUS incommon. Meanwhile, the number of sense amplifier units SAU connected toone bus DBUS is arbitrary. In the following description, the sixteensense amplifier units SAU connected to one bus DBUS in common aredistinguished from each other by being referred to as SAU<0> to SAU<15>,respectively.

The latch circuit XDL is provided for each sense amplifier unit SAU, andtemporarily holds data related to the corresponding bit line BL. Sixteenlatch circuits XDL<15:0> respectively corresponding to the senseamplifier units SAU<15> to SAU<0> are connected to one bus DBUS incommon. In addition, each of the latch circuits XDL is connected to adata line IO. The latch circuit XDL is used to transmit and receive databetween the sense amplifier unit SAU and the outside through the busDBUS and the data line IO. That is, for example, data received from anexternal controller or the like is first held in the latch circuit XDLthrough the data line IO, and is then transmitted to the sense amplifierunit through the bus DBUS.

1.1.4 Configuration of Sense Amplifier Unit

Next, a configuration of the sense amplifier unit SAU will be describedwith reference to FIG. 5. In this embodiment, a current sensing typesense amplifier unit SAU that senses a current flowing through a bitline BL is described as an example, but a voltage sensing type senseamplifier unit SAU may be used.

As shown in FIG. 5, the sense amplifier unit SAU includes a senseamplifier section SA, four latch circuits (SDL, ADL, BDL, and CDL), aprecharge circuit 30, and a bus switch 32.

The sense amplifier section SA senses data which is read out to the bitline BL, and applies a voltage to the bit line BL in accordance withprogramming data. That is, the sense amplifier section SA is a modulethat directly controls the bit line BL. Further, the sense amplifiersection is a module that performs an AND operation or an OR operationusing data within the latch circuits SDL, ADL, BDL, and CDL.

Next, a circuit of the sense amplifier section SA will be described indetail. In the following description, one of a source and a drain of atransistor is referred to as “one end of a current path,” and the otherof the source and the drain is referred to as “the other end of acurrent path.”

As shown in the drawing, the sense amplifier section SA includes a highbreakdown voltage n-channel MOS transistor 40, low breakdown voltagen-channel MOS transistors 41 to 50, a low breakdown voltage p-channelMOS transistor 51, and a capacitor element 52.

In the transistor 40, a signal BLS is input to a gate, one end of acurrent path is connected to the corresponding bit line BL, and theother end of the current path is connected to a node BLI.

In the transistor 41, a signal BLC is input to a gate, one end of acurrent path is connected to the node BLI, and the other end of thecurrent path is connected to a node SCOM. The transistor 41 is used toclamp the corresponding bit line BL to a potential according to thesignal BLC.

In the transistor 42, a signal BLX is input to a gate, one end of acurrent path is connected to the node SCOM, and the other end of thecurrent path is connected to a node SSRC.

In the transistor 43, a gate is connected to a node LAT_S, one end of acurrent path is connected to the node SSRC, and the other end of thecurrent path is connected to a node SRCGND. For example, a groundvoltage VSS is applied to the node SRCGND.

In the transistor 51, a gate is connected to the node LAT_S, a powersupply voltage VDDSA is applied to one end of a current path, and theother end of the current path is connected to the node SSRC.

In the transistor 44, a signal XXL is input to a gate, one end of acurrent path is connected to the node SCOM, and the other end of thecurrent path is connected to a node SEN.

In the transistor 45, a signal HLL is input to a gate, a voltage VSENPis applied to one end of a current path, and the other end of thecurrent path is connected to the node SEN.

In the capacitor element 52, one electrode is connected to the node SEN,and a clock CLK is input to the other electrode.

In the transistor 47, a gate is connected to the node SEN, one end of acurrent path is connected to one end of a current path of the transistor48, and a clock CLK is input to the other end of the current path.

In the transistor 48, a signal STB is input to a gate, and the other endof the current path is connected to a bus LBUS.

In the transistor 46, a signal BLQ is input to a gate, one end of acurrent path is connected to the node SEN, and the other end of thecurrent path is connected to the bus LBUS.

In the transistor 49, a gate is connected to the bus LBUS, one end of acurrent path is connected to one end of a current path of the transistor50, and a voltage VLSA is applied to the other end of the current path.A voltage VLSA may be, for example, a ground voltage VSS.

In the transistor 50, a signal LSL is input to a gate, and the other endof the current path is connected to the node SEN.

The latch circuits SDL, ADL, BDL, and CDL temporarily hold data. Duringa data writing operation, the sense amplifier section SA controls thebit line BL in accordance with the data held in the latch circuit SDL.For example, the other latch circuits ADL, BDL, and CDL are used for amulti-value operation of individual memory cell transistors holding dataof 2 bits or more. Meanwhile, the number of latch circuits can bearbitrarily set, and is set in accordance with, for example, the amountof data (the number of bits) which is capable of being held by thememory cell transistor.

The latch circuit SDL includes low breakdown voltage n-channel MOStransistors 60 to 63 and low breakdown voltage p-channel MOS transistors64 to 67.

In the transistor 60, a signal STL is input to a gate, one end of acurrent path is connected to the bus LBUS, and the other end of thecurrent path is connected to the node LAT_S.

In the transistor 61, a signal STI is input to a gate, one end of acurrent path is connected to the bus LBUS, and the other end of thecurrent path is connected to the node INV_S.

In the transistor 62, a gate is connected to the node INV_S, one end ofa current path is grounded, and the other end of the current path isconnected to the node LAT_S.

In the transistor 63, a gate is connected to the node LAT_S, one end ofa current path is grounded, and the other end of the current path isconnected to the node INV_S.

In the transistor 64, a gate is connected to the node INV_S, and one endof a current path is connected to the node LAT_S.

In the transistor 65, a gate is connected to the node LAT_S, and one endof a current path is connected to the node INV_S.

In the transistor 66, a signal SLL is input to a gate, one end of acurrent path is connected to the other end of the current path of thetransistor 64, and a power supply voltage VDDSA is applied to the otherend of the current path of the transistor 66.

In the transistor 67, a signal SLI is input to a gate, one end of acurrent path is connected to the other end of the current path of thetransistor 65, and a power supply voltage VDDSA is applied to the otherend of the current path of the transistor 67.

In the latch circuit SDL, a first inverter is constituted by thetransistors 62 and 64, and a second inverter is constituted by thetransistors 63 and 65. In addition, an output of the first inverter andan input (node LAT_S) of the second inverter are connected to the busLBUS through the transistor 60 for data transmission, and an input ofthe first inverter and an output (node INV_S) of the second inverter areconnected to the bus LBUS through the transistor 61 for datatransmission. The latch circuit SDL holds data by the node LAT_S andholds the inverted data thereof by the node INV_S.

The latch circuits ADL, BDL, and CDL have the same configuration as thatof the latch circuit SDL, and thus a description thereof will beomitted. A reference numeral and signal name of each transistor will bedescribed by being distinguished from those of the latch circuit SDL asin FIG. 5. In addition, in each sense amplifier unit SAU, a senseamplifier section SA and four latch circuits SDL, ADL, BDL, and CDL areconnected to each other through the bus LBUS so as to be able totransmit and receive data to and from each other.

The precharge circuit 30 precharges the bus LBUS. The precharge circuit30 includes, for example, a low breakdown voltage n-channel MOStransistor 31. In the transistor 31, a signal LPC is input to a gate,one end of a current path is connected to the bus LBUS, and a voltageVHLB is applied to the other end of the current path. In addition, theprecharge circuit 30 transmits the voltage VHLB to the bus LBUS tothereby precharge the bus LBUS.

The bus switch 32 connects the bus LBUS and the bus DBUS to each other.That is, the bus switch 32 connects the sense amplifier section SA andthe latch circuit XDL to each other. The bus switch 32 includes, forexample, a low breakdown voltage n-channel MOS transistor 33. In thetransistor 33, a signal DSW is input to a gate, one end of a currentpath is connected to the bus LBUS, and the other end of the current pathis connected to the bus DBUS.

Meanwhile, various signals in the sense amplifier unit SAU having theabove-described configuration are output by, for example, the controlcircuit 5.

1.2 Threshold Voltage Distribution of Memory Cell Transistor

Next, a possible threshold voltage distribution of the memory celltransistor MT according to this embodiment will be described withreference to FIG. 6. Hereinafter, in this embodiment, a case where amemory cell transistor MT can hold data of eight values is described,but data capable of being held is not limited to the eight values. Inthis embodiment, the memory cell transistor MT may hold data of fourvalues or more (data of 2 bits or more).

As shown in the drawing, a threshold voltage of each of the memory celltransistors MT has a discrete value, for example, a value included inany of eight distributions. These eight distributions are referred to asan “Er” level, an “A” level, a “B” level, a “C” level, a “D” level, an“E” level, an “F” level, and a “G” level in ascending order of athreshold voltage value.

As shown in FIG. 6B, the “Er” level is equivalent to, for example, adata erasure state. In addition, a threshold voltage included in the“Er” level is smaller than a voltage VfyA and has a positive or negativevalue.

The “A” to “G” levels are equivalent to a state in which charge isinjected into a charge storage layer and data is written, and athreshold voltage included in each distribution has, for example, apositive or negative value. A threshold voltage included in the “A”level is a voltage VfyA or greater and is less than a voltage VfyB(here, VfyB>VfyA). A threshold voltage included in the “B” level is avoltage VfyB or greater and is less than a voltage VfyC (here,VfyC>VfyB). A threshold voltage included in the “C” level is a voltageVfyC or greater and is less than a voltage VfyD (here, VfyD>VfyC). Athreshold voltage included in the “D” level is a voltage VfyD or greaterand is less than a voltage VfyE (here, VfyE>VfyD). A threshold voltageincluded in the “E” level is a voltage VfyE or greater and is less thana voltage VfyF (here, VfyF>VfyE). A threshold voltage included in the“F” level is a voltage VfyF or greater and is less than a voltage VfyG(here, VfyG>VfyF). In addition, a threshold voltage included in the “G”level is a voltage VfyG or greater and is less than voltages VREAD andVPASS (here, VREAD>VfyG). Meanwhile, VREAD is a voltage applied to anon-selected word line WL during a data read-out operation, and VPASS isa voltage applied to a non-selected word line during a data writingoperation.

As described above, each of the memory cell transistors MT has any ofeight threshold voltage distributions, and thus can take eight types ofstates. These states are allocated to “000” to “111” as binary numbers,and each of the memory cell transistors MT can hold 3-bit data. The bitsof the 3-bit data may be referred to as a high-order bit, a middle-orderbit, and a low-order bit, respectively.

As shown in FIG. 6A, in this embodiment, regarding the allocation ofdata with respect to “Er” to “G” levels, data of the “Er” level is setto be “111”, data of the “A” level is set to be “011”, data of the “B”level is set to be “101”, data of the “C” level is set to be “001”, dataof the “D” level is set to be “000”, data of the “E” level is set to be“100”, data of the “F” level is set to be “010”, and data of the “G”level is set to be “110”. Meanwhile, the allocation of data with respectto the levels can be arbitrarily set.

Although details will be described later, data is collectively writtenwith respect to a plurality of memory cell transistors MT (for example,L memory cell transistors MT connected to all bit lines) which areconnected to one word line WL. This unit is referred to as a page. Inaddition, a set of high-order bits that are collectively written may bereferred to as an upper page, a set of middle-order bits may be referredto as a middle page, and a set of low-order bits may be referred to as alower page.

Meanwhile, although a case where eight levels are discretely distributedis described as an example in FIG. 6, this is an ideal state, forexample, immediately after data writing. Accordingly, adjacent levelsmay overlap each other during actual use. For example, after datawriting, an upper end of the “Er” level and a lower end of the “A” levelmay overlap each other due to disturbance or the like. In this case,data is corrected using, for example, an ECC technique or the like.

1.3 Arithmetic Operation Using Sense Amplifier Section

Next, an AND operation and an OR operation using a sense amplifiersection SA will be described.

1.3.1 AND Operation

First, an AND operation will be described. Hereinafter, as an example ofthe AND operation, a description will be given of a case where an ANDoperation of data held in the latch circuit BDL and data held in thelatch circuit CDL is performed, and a result thereof is held in thelatch circuit SDL. FIG. 7 shows pieces of data that are held in thelatch circuits BDL, CDL, and SDL, the node SEN, and the bus LBUS withrespect to each process of an AND operation. Table (a) of FIG. 7 showsan arithmetic process in a case where the latch circuits BDL and CDLhold data of ‘1’. Table (b) shows an arithmetic process in a case wherethe latch circuit BDL holds data of ‘1’ and the latch circuit CDL holdsdata of ‘0’. Table (c) shows an arithmetic process in a case where thelatch circuit BDL holds data of ‘0’ and the latch circuit CDL holds dataof ‘1’. Table (d) shows an arithmetic process in a case where the latchcircuits BDL and CDL hold data of ‘0’. In addition, in FIG. 7, thenotation of ‘1’ indicates a signal (voltage) of an “H” level, and thenotation of ‘0’ indicates a signal (voltage) of an “L” level. Inaddition, in the tables of FIG. 7, a shaded portion indicates anarithmetic operation result in each step.

First, the control circuit 5 sets the signals LPC and BLQ to be at an“H” level to thereby set the transistors 31 and 46 to be in the on state(step 0). Thereby, the bus LBUS and the node SEN are precharged to an“H” level (data of ‘1’). The control circuit 5 sets the signals LPC andBLQ to be at an “L” level after the precharging.

Next, the control circuit 5 sets the signal BTL to be at an “H” level tothereby set the transistor 80 to be in the on state (step 1). Thereby,when the node LAT_B holds data of ‘1’ (latch circuit BDL holds data of‘1’), the bus LBUS holds data of ‘1’ ((a) and (b) of FIG. 7). When thenode LAT_B holds data of ‘0’ (latch circuit BDL holds data of ‘0’), thebus LBUS holds data of ‘0’ ((c) and (d) of FIG. 7).

Next, the control circuit 5 sets the signal LSL to be at an “H” level tothereby set the transistor 50 to be in the on state (step 2). Then, whenthe bus LBUS holds data of ‘1’, the transistor 49 enters the on state,and thus the node SEN holds data of ‘0’ ((a) and (b) of FIG. 7). Whenthe bus LBUS holds data of ‘0’, the transistor 49 enters the off state,and thus the node SEN holds data of ‘1’ ((c) and (d) of FIG. 7). Thatis, when the latch circuit BDL holds data of ‘1’, the node SEN holdsdata of ‘0’. When the latch circuit BDL holds data of ‘0’, the node SENholds data of ‘1’.

Next, the control circuit 5 precharges the bus LBUS, and then sets asignal CTL to be at an “H” level to thereby set the transistor 90 to bein the on state (step 3). Thereby, when the node LAT_C holds data of ‘1’(latch circuit CDL holds data of ‘1’), the bus LBUS holds data of ‘1’((a) and (c) of FIG. 7). When the node LAT_C holds data of ‘0’ (latchcircuit CDL holds data of ‘0’), the bus LBUS holds data of ‘0’ ((b) and(d) of FIG. 7).

Next, the control circuit 5 sets the signal CLL to be at an “H” level tothereby set the transistor 96 to be in the off state (step 4). That is,the control circuit 5 stops the supply of voltage to the node LAT_C.

Next, the control circuit 5 sets the signal STB to be at an “H” level tothereby set the transistor 48 to be in the on state (step 5). Then, whenthe node SEN holds data of ‘1’ ((c) and (d) of FIG. 7), the transistor47 enters the on state, and thus the bus LBUS holds data of ‘0’. Whenthe node SEN holds data of ‘0’ ((a) and (b) of FIG. 7), the transistor47 enters to off state, and thus the bus LBUS is maintained in a stateof data of ‘0’ or data of ‘1’. Accordingly, the bus LBUS holds data of‘1’ when the node SEN holds data of ‘0’ and the bus LBUS holds data of‘1’ (both the latch circuits BDL and CDL hold data of ‘1’ ((a) of FIG.7)), and holds data of ‘0’ in the other cases ((b) to (d) of FIG. 7).That is, the bus LBUS holds results of an AND operation of data held inthe latch circuits BDL and CDL.

Next, the control circuit 5 sets the signals SLL and STL to be at an “H”level to thereby set the transistor 66 to be in the off state and setthe transistor 60 to be in the on state, and stores data of the bus LBUSin the latch circuit SDL (step 6).

1.3.2 OR Operation

Next, an OR operation will be described with reference to FIG. 8.Hereinafter, only differences from an AND operation will be described.

First, similarly to the case of an AND operation, the control circuit 5precharges the bus LBUS and the node SEN to be at an “H” level (data of‘1’) (step 0).

Next, the control circuit 5 sets a signal BTI to be at an “H” level tothereby set the transistor 81 to be in the on state (step 1). Thereby,when the node INV_B holds data of ‘0’, the bus LBUS holds data of ‘0’.When the node INV_B holds data of ‘1’, the bus LBUS holds data of ‘1’.That is, the bus LBUS holds data of ‘0’ when data of the latch circuitBDL is ‘1’ ((a) and (b) of FIG. 8), and holds data of ‘1’ when data ofthe latch circuit BDL is ‘0’ ((c) and (d) of FIG. 8).

Next, similarly to the case of an AND operation, the control circuit 5sets the signal LSL to be at an “H” level to thereby set the transistor50 to be in the on state (step 2). In an OR operation, when data of thelatch circuit BDL is ‘1’ ((a) and (b) of FIG. 8), the node SEN holdsdata of ‘1’. When data of the latch circuit BDL is ‘0’ ((c) and (d) ofFIG. 8), the node SEN holds data of ‘0’.

Next, the control circuit 5 precharges the bus LBUS, and then sets thesignal CTI to be at an “H” level to thereby set the transistor 91 to bein the on state (step 3). Thereby, the bus LBUS holds data of ‘0’ whenthe node INV_C holds data of ‘0’, and holds data of ‘1’ when the nodeINV_C holds data of ‘1’. That is, the bus LBUS holds data of ‘0’ whendata of the latch circuit CDL is ‘1’ ((a) and (c) of FIG. 8), and holdsdata of ‘1’ when data of the latch circuit CDL is ‘0’ ((b) and (d) ofFIG. 8).

Next, the control circuit 5 sets a signal CLI to be at an “H” level tothereby set the transistor 97 to be in the off state (step 4). That is,the control circuit 5 stops the supply of a voltage to the node INV_C.

Next, similarly to the case of an AND operation, the control circuit 5sets the signal STB to be at an “H” level to thereby set the transistor48 to be in the on state (step 5). When the node SEN holds data of ‘1’((a) and (b) of FIG. 8), the transistor 47 enters the on state, and thusthe bus LBUS holds data of ‘0’. When the node SEN holds data of ‘0’ ((c)and (d) of FIG. 8), the transistor 47 enters the off state, and thus busLBUS is maintained in a state of data of ‘0’ or data of ‘1’.Accordingly, the bus LBUS holds data of ‘1’ when the node SEN holds dataof ‘1’ and the bus LBUS holds data of ‘0’, that is, when both the latchcircuits BDL and CDL hold data of ‘0’ ((d) of FIG. 8), and holds data of‘0’ in the other cases ((a) to (c) of FIG. 8). That is, the bus LBUSholds inverted data of an OR operation of data held in the latchcircuits BDL and CDL.

Next, the control circuit 5 sets the signal SLI and STI to be at an “H”level to thereby set the transistor 67 to be in the off state and setthe transistor 61 to be in the on state, and stores inverted data of thebus LBUS in the latch circuit SDL (step 6).

1.4 Write Operation

Next, a data writing operation according to this embodiment will bebriefly described. The writing operation roughly includes a programmingoperation and a verification operation.

The programming operation is an operation of injecting electrons into acharge storage layer to thereby increase a threshold voltage (orinhibiting injection to thereby maintain a threshold voltage).Hereinafter, an operation of increasing a threshold voltage is referredto as “programming of ‘0’” or “writing of ‘0’”, and a bit line BL whichis a target for programming of ‘0’ is given data of ‘0’. On the otherhand, an operation of maintaining a threshold voltage is referred to as“programming of ‘1’”, “writing of ‘1’”, or “writing inhibition”, and abit line BL which is a target for programming of ‘1’ is given data of‘1’.

The verification operation is an operation of reading out data after aprogramming operation is performed, to thereby determine whether or nota threshold voltage of a memory cell transistor MT reaches a targetlevel. The memory cell transistor MT reaching the target level isinhibited from writing thereafter.

A combination of the above-mentioned programming operation andverification operation is repeated, and thus the threshold voltage ofthe memory cell transistor MT is increased to the target level.

1.4.1 Overall Flow of Writing Operation

First, the overall flow of a writing operation will be described withreference to FIG. 9. FIG. 9 is a flow chart showing a flow of a writingoperation.

As shown in the drawing, first, data received from an externalcontroller is stored in the latch circuits XDL, BDL, and CDL (step S10).More specifically, for example, with respect to 3-bit data written inthe memory cell transistor MT, the latch circuit XDL holds data of alow-order bit, the latch circuit BDL holds data of a middle-order bit,and the latch circuit CDL holds data of a high-order bit.

Next, in the sense amplifier unit SAU, the control circuit 5 performs anAND operation of data held in the latch circuits XDL, BDL, and CDL, andstores a result thereof in the latch circuit ADL (step S11). Forexample, data of ‘1’ is stored in a latch circuit ADL corresponding toan “Er” level, and data of ‘0’ is stored in latch circuits ADLcorresponding to “A” to “G” levels.

Next, the control circuit 5 stores inverted data of the latch circuitADL in the latch circuit SDL (step S12). For example, data of ‘0’ isstored in a latch circuit SDL corresponding to an “Er” level, and dataof ‘1’ is stored in latch circuits SDL corresponding to “A” to “G”levels. In a programming operation, programming of ‘0’ or programming of‘1’ is selected in accordance with data of the latch circuit SDL at thistime.

Next, the control circuit executes a programming operation (step S13).More specifically, for example, when data of ‘0’ is stored in the latchcircuit SDL (“Er” level), programming of ‘1’ is executed on thecorresponding memory cell transistor MT. When data of ‘1’ is stored inthe latch circuit SDL (“A” to “G” levels), programming of ‘0’ isexecuted.

Next, the control circuit 5 performs an arithmetic operation of data(data of a middle-order bit and a high-order bit) of the latch circuitsBDL and CDL using an arithmetic expression (will be described later indetail) according to a writing level which is a target for averification operation, and stores results thereof in the latch circuitSDL (step S14). In the verification operation, whether to apply aprecharge voltage to a bit line BL is selected in accordance with thedata of the latch circuit SDL at this time. The precharge voltage in theverification operation refers to a voltage which is applied to a bitline BL at the time of reading out data of a memory cell transistor MT,for example, a voltage which is higher than a ground voltage VSS.

Next, a verification operation is executed (step S15). Morespecifically, for example, when data of ‘0’ is stored in the latchcircuit SDL, a precharge voltage is applied to the corresponding bitline BL. When data of ‘1’ is stored in the latch circuit SDL, forexample, a voltage VSS is applied to the corresponding bit line BL, anda precharge voltage is not applied thereto.

Results of the verification operation are stored in the latch circuitSDL. For example, when the verification operation is passed, data of ‘0’is stored in the latch circuit SDL. When the verification operationfails, data of ‘1’ is stored in the latch circuit SDL. In addition, dataof ‘1’ is also stored in a latch circuit SDL of a sense amplifier unitSAU which is not a target for verification.

Next, the control circuit 5 performs an OR operation of inverted data ofthe latch circuit SDL and data of the latch circuit ADL, and stores aresult thereof in the latch circuit ADL (step S16). Thereby, the data ofthe latch circuit ADL is updated. More specifically, for example, when averification operation with respect to an “A” level is executed, data of‘0’ is updated to data of ‘1’ when the verification operation is passedin a latch circuit ADL corresponding to an “A” level, and data of ‘0’ ismaintained when the verification operation fails. In addition, in alatch circuit ADL that does not correspond to an “A” level, data whichis held is maintained.

When a verification operation with respect to another writing level iscontinuously executed (Yes in step S17), the control circuit 5 returnsto step S14 and performs an arithmetic operation according to a writinglevel which is a target for a verification operation.

When a verification operation with respect to another writing level isnot continuously executed (No in step S17), the control circuit 5terminates a writing operation, or returns to step S13 again todetermine whether to execute programming.

Specifically, when a verification operation executed corresponds to thehighest writing level (for example, a “G” level) (Yes in step S18), thewriting operation is terminated when the verification operation ispassed (Yes in step S19).

When a verification operation is not a verification operation withrespect to the highest writing level (No in step S18) or when theverification operation fails even in a case of being a verificationoperation with respect to the highest writing level (No in step S19),the control circuit 5 determines whether or not the number of times ofprogramming reaches a predetermined number of times (step S20).

In addition, when the number of times of programming reaches apredetermined number of times (Yes in step S20), the control circuit 5terminates the writing operation.

When the number of times of programming does not reach a predeterminednumber of times (No in step S20), the control circuit 5 returns to stepS12 to store inverted data of the latch circuit ADL in the latch circuitSDL, and then executes a programming operation (step S13).

1.4.2 Voltage of Each Wiring in Programming Operation

Next, a voltage of each wiring in a programming operation will bedescribed with reference to FIG. 10.

FIG. 10 shows changes in a potential of each wiring in a programmingoperation. As shown in the drawing, first, the sense amplifier 4transmits programming data to each bit line BL. A ground voltage VSS(for example, 0 V) s applied to a bit line BL given data of ‘0’, as an“L” level. For example, 2.5 V is applied to a bit line BL given data of‘1’, as an “H” level.

In addition, the row decoder 3 selects one of the blocks BLK and selectsone of the string units SU. In addition, for example, 5 V is applied toa select-gate line SGD in the selected string unit SU, thereby setting aselection transistor ST1 to be in the on state. On the other hand, avoltage VSS is applied to a select-gate line SGS, thereby setting aselection transistor ST2 to be in the off state.

Further, the row decoder 3 applies voltages 1 V and VSS respectively toselect-gate lines SGD and SGS of a non-selected string unit SU in aselected block BLK and a non-selected string unit SU in a non-selectedblock BLK to thereby set the selection transistors ST1 and ST2 to be inthe off state.

In addition, a source line SL is set to, for example, 1 V (potentialhigher than the potential of the select-gate line SGS).

Thereafter, the row decoder 3 sets the potential of the select-gate lineSGD in the selected string unit SU in the selected block BLK to, forexample, 2.5 V. The potential is a voltage that turns on a selectiontransistor ST1 corresponding to a bit line BL given data of ‘0’ (forexample, 0 V) and cuts off a selection transistor ST1 corresponding to abit line BL given data of ‘1’ (for example, 2.5 V).

In addition, the row decoder 3 selects one of the word lines WL in theselected block BLK, applies a voltage VPGM to the selected word line,and applies a voltage VPASS to the other non-selected word lines WL. Thevoltage VPGM is a high voltage for injecting electrons into a chargestorage layer in accordance with a tunneling phenomenon, and therelation of VPGM>VPASS is established.

In the NAND string corresponding to the bit line BL which is a targetfor writing of ‘0’, a selection transistor ST1 enters the on state. Forthis reason, a channel potential Vch of a memory cell transistor MTwhich is connected to the selected word line WL is set to 0 V. That is,a difference in potential between a control gate and a channelincreases. As a result, electrons are injected into a charge storagelayer, and thus a threshold voltage of the memory cell transistor MT isincreased.

In the NAND string corresponding to the bit line BL which is a targetfor writing of ‘1’, a selection transistor ST1 enters the cut-off state.For this reason, a channel of a memory cell transistor MT which isconnected to the selected word line WL is set to be in an electricallyfloating state, and thus a channel potential Vch increases up toapproximately a voltage VPGM due to capacity coupling to a word line WLor the like. That is, a difference in potential between a control gateand a channel decreases. As a result, electrons are not injected into acharge storage layer, and thus a threshold voltage of the memory celltransistor MT is maintained (the threshold voltage does not fluctuate tothe extent that that a threshold voltage distribution level transitionsto a higher distribution).

1.4.3 Verification Operation

Next, a verification operation in this embodiment will be described. Inthis embodiment, a bit line BL to which a precharge voltage is to beapplied is selected during a verification operation in accordance withdata of a latch circuit SDL (hereinafter, referred to as “selectionprecharge”). More specifically, for example, when data of ‘0’ (“L” data)is held in the latch circuit SDL, a sense amplifier unit SAU applies aprecharge voltage to the corresponding bit line BL. On the other hand,when data of ‘1’ (“H” data) is held in the latch circuit SDL, the senseamplifier unit SAU applies, for example, a ground voltage VSS to thecorresponding bit line BL and does not apply a precharge voltage.Hereinafter, a bit line to which a precharge voltage is applied isreferred to as BL (“pre-charge”), and a bit line to which a prechargevoltage is not applied is referred to as BL (“lockout”).

1.4.3.1 Data Held in Latch Circuit SDL During Verification Operation

Next, data held in the latch circuit SDL during a verification operationwill be described with reference to FIG. 11.

As shown in the drawing, in this embodiment, with respect to 3-bit datawritten in the memory cell transistor MT, the latch circuit XDL holdsdata of a low-order bit, the latch circuit BDL holds data of amiddle-order bit, and the latch circuit CDL holds data of a high-orderbit.

The latch circuit ADL holds information regarding pass (for example, setto be data of ‘1’) and failure (for example, set to be data of ‘0’) ofverification. The example of FIG. 11 shows data of the latch circuit ADLin an initial state (during a first programming operation). Morespecifically, in the initial state, a latch circuit ADL corresponding toan “Er” level holds data of ‘1’, and latch circuits ADL corresponding to“A” to “G” levels hold data of ‘0’.

In addition, the latch circuit ADL updates held data in accordance witha verification result. For example, when the latch circuit performs averification operation with respect to the “A” level and passes theverification, data of a latch circuit ADL corresponding to an “A” levelis updated from ‘0’ to ‘1’. On the other hand, when the latch circuitfails in the verification, the data of the latch circuit ADL ismaintained in a state of ‘0’.

During the verification operation, results of an arithmetic operation ofdata of the latch circuit BDL and data of the latch circuit CDL arestored in the latch circuit SDL. Accordingly, in the case of thisembodiment, in the “A” level and the “F” level, the “B” level and the“E” level, the “C” level and the “D” level, and the “Er” level and the“G” level, pieces of data respectively stored in the latch circuits BDLand CDL are the same as each other, and thus arithmetic operationresults become the same as each other. Accordingly, in the verificationoperation, a precharge voltage is applied to a bit line BL of a levelwhich is a target for the verification operation and a bit line BL of alevel in which data of a middle-order bit and data of a high-order bitare the same as each other. For example, a precharge voltage is appliedto bit lines BL corresponding to an “A” level and an “F” level in averification operation with respect to an “A” level, and a prechargevoltage is applied to bit lines BL corresponding to an “A” level and an“F” level even in a verification operation with respect to an “F” level.

More specifically, in a verification operation with respect to an “A”level or an “F” level, data of a logical arithmetic expression;SDL=/(BDL×(/CDL)) is stored in a latch circuit SDL. Here, “/” meansinversion of data, and “×” means an AND operation. Accordingly, in averification operation with respect to an “A” level or an “F” level,data of ‘1’ is stored in latch circuits SDL corresponding to “Er”, “B”to “E”, and “G” levels, and data of ‘0’ is stored in latch circuits SDLcorresponding to “A” and “F” levels.

Similarly, in a verification operation with respect to a “B” level or an“E” level, data of a logical arithmetic expression; SDL=/((/BDL)×CDL) isstored in a latch circuit SDL. Accordingly, in a verification operationwith respect to a “B” level or an “E” level, data of ‘1’ is stored inlatch circuits SDL corresponding to “Er”, “A”, “C”, “D”, “F”, and “G”levels, and data of ‘0’ is stored in latch circuits SDL corresponding to“B” and “E” levels.

In a verification operation with respect to a “C” level or a “D” level,data of a logical arithmetic expression; SDL=/((/BDL)×(/CDL)) is storedin a latch circuit SDL. Accordingly, in a verification operation withrespect to a “C” level or a “D” level, data of ‘1’ is stored in latchcircuits SDL corresponding to “Er” to “B” and “E” to “G” levels, anddata of ‘0’ is stored in latch circuits SDL corresponding to “C” and “D”levels.

In a verification operation with respect to a “G” level, data of alogical arithmetic expression; SDL=/(BDL×CDL) is stored in a latchcircuit SDL. Accordingly, in a verification operation with respect to a“G” level, data of ‘1’ is stored in latch circuits SDL corresponding to“A” to “F” levels, and data of ‘0’ is stored in latch circuits SDLcorresponding to “Er” and “G” levels.

1.4.3.2 Voltage of Each Wiring in Verification Operation

Next, a voltage of each wiring in a verification operation will bedescribed with reference to FIG. 12. FIG. 12 is a timing chart showing avoltage of each wiring in a verification operation in the memory cellarray 2 and the sense amplifier unit SAU.

At time t1, the row decoder 3 applies a voltage VSG to select-gate linesSGD and SGS corresponding to a memory cell transistor MT which is atarget for programming, and sets selection transistors ST1 and ST2 to bein the on state. The row decoder 112 applies a voltage VCGRV to aselected word line WL and applies VREAD to a non-selected word line WL.The voltage VCGRV is a voltage which is set in accordance with read-outdata (verification level in the case of a verification operation). Thevoltage VREAD is a voltage for setting the memory cell transistor MT tobe in the on state regardless of a threshold voltage of the memory celltransistor MT, and the relation of VREAD>VCGRV is established.

The control circuit 5 sets a signal BLS to be at an “H” level in thesense amplifier unit SAU. That is, a voltage VBLS (for example, 7 V) isapplied to the gate of the transistor 40 to set the transistor 40 to bein the on state, thereby connecting the sense amplifier unit SAU and thecorresponding bit line BL to each other.

At time t2, the control circuit 5 sets a signal BLC and a signal BLX tobe at an “H” level in the sense amplifier unit SAU. That is, a voltageVBLC (for example, 0.5 V+Vtn) is applied to the gate of the transistor41 to thereby set the transistor 41 to be in the on state. The voltageVtn is a threshold voltage of a low breakdown voltage n-channel MOStransistor within the sense amplifier unit SAU. Similarly, a voltageVBLX (for example, 0.75 V+Vtn) is applied to the transistor 42 tothereby set the transistor 42 to be in the on state. A relationshipbetween the voltage VBLX and the voltage VBLC is VBLX≧VBLC.

At this time, when data of ‘0’, that is, “L” data is held in the latchcircuit SDL, the transistor 51 enters the on state, and a voltage VDDSAis applied to the transistor 42. Accordingly, a precharge voltage VPCH(for example, 0.5 V) which is clamped by the transistor 41 is applied toa bit line BL (“pre-charge”). In addition, a cell current Icell flowsfrom a bit line BL side to a source line SL side in accordance with athreshold voltage Vtc of a memory cell transistor MT which is a targetfor verification. More specifically, when the threshold voltage Vtc islower than a voltage VCGRV and the memory cell transistor MT is set tobe in the on state, that is, when programming is not completed, a cellcurrent Icell flows in the corresponding sense amplifier unit SAU. Onthe other hand, when the threshold voltage Vtc is higher than a voltageVCGRV and the memory cell transistor MT is set to be in the off state,that is, when programming is completed, the memory cell transistor MTenters the off state, and a cell current Icell does not flow in thecorresponding sense amplifier unit SAU.

On the other hand, when data of ‘1’, that is, “H” data is held in thelatch circuit SDL, the transistor 43 enters the on state, and, forexample, a voltage VSS is applied to the transistor 42 through the nodeSRCGND. Accordingly, for example, a voltage VSS is applied to a bit lineBL (“lockout”).

At time t3, the control circuit 5 sets a signal HLL to be at an “H”level. More specifically, a voltage VHLL (for example, 4 V) is appliedto the gate of the transistor 45 to thereby set the transistor 45 to bein the on state. Thereby, a voltage VSENP (for example, 2.5 V) isapplied to the node SEN.

In addition, after the charging of the node SEN is completed, thecontrol circuit 5 sets a signal HLL to be at an “L” level to thereby setthe transistor 45 to be in the off state.

At time t4, the control circuit 5 sets a signal LPC to be at an “H”level to thereby set the transistor 31 of the precharge circuit 30 to bein the on state. Thereby, a voltage VHLB (for example, 2.5 V) is appliedto the bus LBUS. In addition, after the charging of the bus LBUS iscompleted, the control circuit 5 sets a signal LPC to be at an “L” levelto thereby set the transistor 31 to be in the off state.

At time t5, the control circuit 5 sets a signal STL to be at an “H”level to thereby set the transistor 60 to be in the on state in thelatch circuit SDL. Thereby, a bus LBUS of a sense amplifier unit SAU inwhich a latch circuit SDL holds data of ‘1’ (“H” data), that is, a senseamplifier unit SAU in which a precharge voltage VPCH is not applied, isset to be at an “H” level. For example, in a verification operation withrespect to an “A” level, buses LBUS of sense amplifier units SAUcorresponding to “Er”, “B” to “E”, and “G” levels are set to be at an“H” level.

The control circuit 5 sets a signal DSW of the bus switch 32 to be at an“H” level to thereby set the transistor 33 to be in the on state. Inaddition, a bus LBUS and either a node (for example, a node LAT_X) whichholds data of a latch circuit XDL or a node (for example, a node INV_X)which holds inverted data are connected to each other in accordance witha verification level.

Thereby, a bus LBUS of a sense amplifier unit SAU which is not a targetfor verification but applies a precharge voltage VPCH is set to be at an“H” level. Specifically, for example, in a verification operation for an“A” level, a latch circuit XDL corresponding to an “A” level holds dataof ‘1’, and a latch circuit XDL corresponding to an “F” level holds dataof ‘0’. Consequently, a bus LBUS and a node (for example, a node INV_X)which holds inverted data of a latch circuit XDL are connected to eachother, and thus a bus LBUS of a sense amplifier unit SAU correspondingto an “A” level is set to be at an “L” level and a bus LBUS of a senseamplifier unit SAU corresponding to an “F” level is set to be at an “H”level.

In addition, for example, in a verification operation for an “F” level,a bus LBUS and a node (for example, a node LAT_X) which holds data of alatch circuit XDL are connected to each other, and thus a bus LBUS of asense amplifier unit SAU corresponding to an “A” level is set to be atan “H” level, and a bus LBUS of a sense amplifier unit SAU correspondingto an “F” level is set to be at an “L” level. Accordingly, a bus LBUS ofa sense amplifier unit SAU (reference numeral (A1) in FIG. 12) which isa target for verification is set to be at an “L” level, and a bus LBUSof a sense amplifier unit SAU (reference numeral (A2) in FIG. 12) whichis not a target for a verification operation is set to be at an “H”level.

At time t6, the control circuit 5 sets a signal LSL to be at an “H”level to thereby set the transistor 50 to be in the on state. When a busLBUS is at an “L” level, the transistor 49 enters the off state.Accordingly, a node SEN of a sense amplifier unit SAU which is a targetfor a verification operation maintains an “H” level, that is, a voltageVSENP (2.5 V) (A1). On the other hand, when a bus LBUS is at an “H”level, the transistor 49 enters the on state. Accordingly, a node SEN ofa sense amplifier unit SAU which is not a target for a verificationoperation is set to be at an “L” level (A2).

At time t7, the control circuit 5 sets a signal XXL to be at an “H”level. That is, the control circuit 5 applies a voltage VXXL (forexample, 1.0 V+Vtn) to the gate of the transistor 44 to thereby set thetransistor 44 to be in the on state. As a result, in a sense amplifierunit SAU which is a target for a verification operation, a voltage (forexample, 1 V) which is clamped by the transistor 44 is applied from anode SEN to a node SCOM. In addition, in a sense amplifier unit SAUwhich is not a target for a verification operation, a node SEN is at an“L” level, and thus a voltage is not applied.

At this time, in a sense amplifier unit SAU which is a target for averification operation, that is, a sense amplifier unit SAUcorresponding to a bit line BL (“pre-charge”), a memory cell transistorMT which is a target for a verification operation is set to be in the onstate, a cell current Icell flows from the sense amplifier unit SAU tothe bit line BL (“pre-charge”). For this reason, a voltage of a node SENdrops significantly. On the other hand, when a memory cell transistor MTwhich is a target for a verification operation is set to be in the offstate, a cell current Icell hardly flows from a sense amplifier unit SAUto a bit line BL (“pre-charge”). For this reason, a voltage of a nodeSEN is reduced very little if at all.

At time t8, the control circuit 5 sets a signal XXL to be at an “L”level to thereby set the transistor 44 to be in the off state.

At time t9, the control circuit 5 sets a signal LPC to be at an “H”level to thereby set the transistor 31 to be in the on state. Thereby, avoltage VHLB (for example, 2.5 V) is applied to a bus LBUS. In addition,after the charging of the bus LBUS is completed, the control circuit 5sets a signal LPC to be at an “L” level to thereby set the transistor 31to be in the off state.

At time t10, the control circuit 5 sets a signal STB to be at an “H”level to thereby set the transistor 48 to be in the on state.

In a sense amplifier unit SAU which is a target for a verificationoperation, when a voltage of a node SEN is lower than a sensedetermination threshold value, that is, a threshold voltage of thetransistor 47, the transistor 47 enters the off state. Accordingly, avoltage of a bus LBUS is hardly reduced. As a result, the bus LBUS holdsdata of ‘1’ (“H” data). On the other hand, when the voltage of the nodeSEN is higher than the sense determination threshold value, thetransistor 47 enters the on state. Accordingly, the voltage of the busLBUS is greatly reduced. As a result, the bus LBUS holds data of ‘0’(“L” data). In addition, in a sense amplifier unit SAU which is not atarget for a verification operation, anode SEN is at an “L” level, andthus the transistor 47 enters the off state. Accordingly, the bus LBUSholds data of ‘1’.

That is, when the corresponding memory cell transistor MT is a targetfor a verification operation, a bus LBUS that passes the verificationoperation holds data of ‘0’, and a bus LBUS that fails in theverification operation holds data of ‘1’. In addition, when thecorresponding memory cell transistor MT is not a target for averification operation, a bus LBUS holds data of ‘1’.

At time t11, the control circuit 5 sets a signal STB to be at an “L”level to thereby set the transistor 47 to be in the off state. Inaddition, the control circuit 5 stores data of a bus LBUS in a latchcircuit SDL. For example, in the latch circuit SDL, the control circuit5 sets a signal SLL to be at an “H” level to thereby set the transistor66 to be in the off state, and sets a signal STL to be at an “H” levelto thereby set the transistor 60 to be in the on state, thereby takingup data held by the bus LBUS in a node LAT_S. Thereby, data of ‘0’ isstored in a latch circuit SDL of a sense amplifier unit SAU which is atarget for a verification operation when the verification operation ispassed, and data of ‘1’ is stored therein when the verificationoperation fails. In addition, data of ‘1’ is stored in a latch circuitSDL of a sense amplifier unit SAU which is not a target for averification operation.

At times t12 to t13, a recovery operation is performed, and averification operation is terminated.

After the verification operation is terminated, the control circuit 5performs an OR operation of inverted data of data stored in a latchcircuit SDL and data of a latch circuit ADL, and stores a result thereofin the latch circuit ADL. Thereby, the data of the latch circuit ADL isupdated.

Meanwhile, the above-mentioned verification operation can also beapplied to a read-out operation.

1.4.4 Specific Example of Write Operation

A writing operation according to this embodiment will be described inmore detail. In FIGS. 13 and 14, a case where data is written by acombination of a programming operation and a verification operationbeing repeated 19 times is shown as an example. Hereinafter, such arepetition operation is referred to as a “loop”.

FIG. 13 shows a target level of a verification operation performed ineach loop. As shown in the drawing, in first and second loops,verification is performed with respect to only an “A” level. In otherwords, during the verification operation, a voltage VfyA is applied to aselected word line WL, and voltages VfyB to VfyG are not applied.Subsequently, in third and fourth loops, a verification operation isperformed with respect to the “A” level and a “B” level. In other words,during the verification operation, voltages VfyA and VfyB aresequentially applied to a selected word line WL, and voltages VfyC toVfyG are not applied.

In fifth and sixth loops, a verification operation is performed withrespect to the “A” level, the “B” level, and a “C” level. In otherwords, during the verification operation, voltages VfyA, VfyB, and VfyCare sequentially applied to a selected word line WL, and voltages VfyDto VfyG are not applied. In addition, the verification operationtargeted at the “A” level is completed in the sixth loop. This isbecause a fact that programming for the “A” level is substantiallycompleted by, for example, six loops is statistically obtained.

In addition, in seventh and eighth loops, a verification operation isperformed with respect to the “B” level, the “C” level, and a “D” level.In other words, voltages VfyB, VfyC, and VfyD are sequentially appliedto a selected word line WL during the verification operation. Inaddition, the verification operation targeted at the “B” level iscompleted in the eighth writing operation.

Further, in ninth and tenth loops, a verification operation is performedwith respect to the “C” level, the “D” level, and an “E” level. In otherwords, voltages VfyC, VfyD, and VfyE are sequentially applied to aselected word line WL during the verification operation. In addition,the verification operation targeted at the “C” level is completed in thetenth loop.

Hereinafter, writing for up to a “G” level is similarly performed, and aloop is repeated a maximum of 19 times.

That is, a verification operation with respect to an “A” level isperformed in first to sixth loops. A verification operation with respectto a “B” level is performed in third to eighth loops. A verificationoperation with respect to a “C” level is performed in fifth to tenthloops. A verification operation with respect to a “D” level is performedin seventh to twelfth loops. A verification operation with respect to an“E” level is performed in ninth to fourteenth loops. A verificationoperation with respect to an “F” level is performed in eleventh tosixteenth loops. A verification operation with respect to a “G” level isperformed in fourteenth to nineteenth loops.

FIG. 14 corresponds to FIG. 13 and shows the state of a bit line BLaccording to a target level of writing during a programming operationperformed in each loop. In FIG. 14, the notation of ‘1’ means that dataof ‘1’ is given (programming of ‘1’) to the corresponding bit line BL,the notation of ‘0’ means that data of ‘0’ is given (programming of ‘0’)to the corresponding bit line BL.

As shown in the drawing, when a threshold voltage of a memory celltransistor MT has to be maintained at an “Er” level, data of ‘1’ isgiven to a bit line BL throughout all loops. That is, a selectiontransistor ST1 is set to be in the cut-off state during a writingoperation.

A programming of ‘0’ operation is performed in first to sixth loops whena target level of a threshold voltage is an “A” level, in other words,with respect to a memory cell transistor MT in which a threshold voltagehas to be increased from a value within the “Er” level to a value withinthe “A” level. This corresponds to a loop in which a verificationoperation with respect to the “A” level is performed. data of ‘0’ isgiven to a bit line BL before the bit line passes verification, and dataof ‘1’ is given thereto after the bit line passes the verification. Inaddition, data of ‘1’ is given to a bit line BL even in a seventh loopin which a programming operation is completed and the subsequent loops,and thus the bit line is inhibited from writing.

When a target level is a “B” level, in other words, with respect to amemory cell transistor MT in which a threshold voltage has to beincreased from a value within an “Er” level to a value within a “B”level, a programming of ‘0’ operation may be performed in first toeighth loops.

Similarly, a programming operation from a “C” level to a “G” level isperformed.

The state of a potential of each wiring in the above-described operationis shown in FIG. 15. FIG. 15 shows changes over time in a potential of aselected word line WL, potentials of bit lines BL (hereinafter, referredto as bit lines BL (“Er”) to BL (“G”)) which write data at “Er” to “G”levels, and a potential of a signal STB in a sense amplifier unit SAU infirst to third, seventh, and eleventh loops.

As shown in the drawing, in the first loop, programming of ‘0’ isperformed on bit lines BL (“A”) to BL (“G”). That is, a voltage VPGM isapplied to the selected word line WL, for example, 2.5 V is applied tothe bit line BL (“Er”), and, for example, a voltage VSS is applied tothe bit lines BL (“A”) to BL (“G”). In addition, a verificationoperation with respect to the “A” level is performed. That is, averification voltage VfyA is applied to the selected word line WL. Atthis time, a precharge voltage VPCH (for example, 0.5 V) is applied tothe bit lines BL (“A”) and BL (“F”).

In the second loop, programming of ‘0’ is performed on the bit line BL(“A”) and the bit lines BL (“B”) to BL (“G”) that fail in a firstverification operation with respect to an “A” level. At this time, avoltage VPGM applied to the selected word line WL is stepped up. Inaddition, similarly to the first loop, a verification operation withrespect to the “A” level is executed.

Similarly to the second loop, in the third loop, programming of ‘0’ isperformed on the bit line BL (“A”) and the bit lines BL (“B”) to BL(“G”) that fail in the verification operation with respect to an “A”level. At this time, a voltage VPGM applied to the selected word line WLis stepped up. In addition, similarly to the first and second loops,first, a verification operation with respect to the “A” level isexecuted. Next, a verification operation with respect to the “B” levelis executed. In the verification operation with respect to the “B”level, a verification voltage VfyB is applied to the selected word lineWL. At this time, a precharge voltage VPCH (for example, 0.5 V) isapplied to the bit lines BL (“B”) and BL (“E”).

The same process is repeated, and programming of ‘0’ is performed on thebit lines BL (“B”) and BL (“C”) and the bit lines BL (“D”) to BL (“G”)that fail in verification, in the seventh loop. At this time, a voltageVPGM applied to the selected word line WL is stepped up from a sixthprogramming operation not shown in the drawing. In addition,verification operations with respect to the (“B”) to (“D”) levels areperformed. In the verification operation with respect to the “B” level,a verification voltage VfyB is applied to the selected word line WL. Atthis time, a precharge voltage VPCH (for example, 0.5 V) is applied tothe bit lines BL (“B”) and BL (“E”). In the verification operation withrespect to the “C” level, a verification voltage VfyC is applied to theselected word line WL. At this time, a precharge voltage VPCH (forexample, 0.5 V) is applied to the bit lines BL (“C”) and BL (“D”). Inthe verification operation with respect to the “D” level, a verificationvoltage VfyD is applied to the selected word line WL. At this time, aprecharge voltage VPCH (for example, 0.5 V) is applied to the bit linesBL (“C”) and BL (“D”).

In addition, in the eleventh loop, programming of ‘0’ is performed onthe bit lines BL (“D”) and BL (“E”) in which verification fails and thebit lines BL (“F”) and BL (“G”). At this time, a voltage VPGM applied tothe selected word line WL is stepped up from a tenth programmingoperation not shown in the drawing. In addition, verification operationswith respect to the (“D”) to (“F”) levels are performed. In theverification operation with respect to the “D” level, a verificationvoltage VfyD is applied to the selected word line WL. At this time, aprecharge voltage VPCH (for example, 0.5 V) is applied to the bit linesBL (“C”) and BL (“D”). In a verification operation with respect to the“E” level, a verification voltage VfyE is applied to the selected wordline WL. At this time, a precharge voltage VPCH (for example, 0.5 V) isapplied to the bit lines BL (“B”) and BL (“E”). In a verificationoperation with respect to the “F” level, a verification voltage VfyF isapplied to the selected word line WL. At this time, a precharge voltageVPCH (for example, 0.5 V) is applied to the bit lines BL (“A”) and BL(“F”).

As described above, for example, when focusing on the bit line BL (“A”),a precharge voltage VPCH is applied to the bit line BL (“A”) in first tosixth loops in which a verification operation with respect to the “A”level is performed and eleventh to sixteenth loops in which averification operation with respect to the “F” level is performed, and aprecharge voltage VPCH is not applied thereto in seventh to tenth andseventeenth to nineteenth loops.

1.4.5 Specific Example of Data Held in Latch Circuit

Next, a specific example of data which is held in latch circuits XDL,ADL, BDL, CDL, and SDL in a data writing operation will be describedwith reference to FIGS. 16 to 18 particularly focusing on a first loop.FIGS. 16 to 18 are diagrams showing pieces of data which are held in thelatch circuits XDL, ADL, BDL, CDL, and SDL.

First, as shown in Table (a) of FIG. 16, the latch circuit XDL receivesprogramming data (3-bit data) from an external controller through a dataline IO. The latch circuit XDL transmits a middle-order bit of theprogramming data to the latch circuit BDL through a bus LBUS, transmitsa high-order bit to the latch circuit CDL, and holds a low-order bittherein. In addition, a sense amplifier unit SAU performs an ANDoperation of pieces of data of the latch circuits XDL, BDL, and CDL in asense amplifier section SA, and stores a result thereof in the latchcircuit ADL (ADL=XDL×BDL×CDL). Meanwhile, data of the latch circuit ADLcould possibly be given from the external controller.

Next, as shown in Table (b), the sense amplifier unit SAU storesinverted data of the latch circuit ADL in the latch circuit SDL(SDL=/ADL).

As a result, data of ‘0’ is stored in a latch circuit SDL correspondingto data of an “Er” level. In addition, data of ‘1’ is stored in latchcircuits SDL corresponding to pieces of data of “A” to “G” levels.

In addition, first programming is executed in accordance with data ofthe latch circuit SDL. That is, programming of ‘1’ is executed in asense amplifier unit SAU corresponding to data of an “Er” level, andprogramming of ‘0’ is executed in sense amplifier units SAUcorresponding to pieces of data of “A” to “G” levels.

Next, as shown in Table (c) of FIG. 17, preparation for executing averification operation with respect to an “A” level is made. Morespecifically, in a case of a verification operation with respect to an“A” level, the control circuit 5 performs an AND operation of data of alatch circuit BDL and inverted data of a latch circuit CDL using a senseamplifier section SA, and stores inverted data of a result thereof in alatch circuit SDL (SDL=/(BDL×(/CDL)).

As a result, data of ‘0’ is stored in latch circuits SDL correspondingto pieces of data of “A” and “F” levels, and data of ‘1’ is stored inlatch circuits SDL corresponding to pieces of data of the other levels.

In addition, a verification operation with respect to an “A” level isperformed on the basis of data of a latch circuit SDL. That is, aprecharge voltage VPCH is applied to bit lines BL (“pre-charge”) whichare connected to sense amplifier units SAU corresponding to pieces ofdata of “A” and “F” levels, and a precharge voltage VPCH is not appliedto bit lines BL (“lockout”) which are connected to sense amplifier unitsSAU corresponding to pieces of data of the other levels.

Next, as shown in Table (d), a result of a verification operation withrespect to an “A” level is stored in a latch circuit SDL(SDL=LBUS=/SEN).

As a result, in a latch circuit SDL corresponding to data of an “A”level, data of ‘0’ is stored when the verification operation is passed,and data of ‘1’ is stored when the verification operation fails. Inaddition, data of ‘1’ is stored in latch circuits SDL corresponding topieces of data of the other levels.

Next, as shown in Table (e) of FIG. 18, a sense amplifier unit SAUperforms an OR operation of data of a latch circuit ADL and inverteddata of a latch circuit SDL in a sense amplifier section SA, and storesa result thereof in the latch circuit ADL (ADL=ADL+(/SDL); “+” means anOR operation).

As a result, in a latch circuit ADL corresponding to data of an “A”level, data of ‘1’ is stored when the verification operation withrespect to an “A” level is passed, and data of ‘0’ is stored when theverification operation fails.

Next, as shown in Table (f), preparation for executing a secondprogramming operation is made. A sense amplifier unit SAU storesinverted data of a latch circuit ADL in a latch circuit SDL.

As a result, data of ‘0’ is stored in a latch circuit SDL correspondingto data of an “Er” level. In a latch circuit SDL corresponding to dataof an “A” level, data of ‘0’ is stored when a verification operationwith respect to an “A” level is passed, and data of ‘1’ is stored whenthe verification operation with respect to an “A” level fails. Inaddition, data of ‘1’ is stored in latch circuits SDL corresponding topieces of data of the other levels.

In addition, second programming is executed in accordance with data of alatch circuit SDL. That is, in a sense amplifier unit SAU correspondingto data of an “Er” level, programming of ‘1’ is executed. In a senseamplifier unit SAU corresponding to data of an “A” level, programming of‘1’ is executed when a verification operation with respect to an “A”level is passed, and programming of ‘0’ is executed when theverification operation with respect to an “A” level fails. In addition,programming of ‘0’ is executed in sense amplifier units SAUcorresponding to pieces of data of “B” to “G” levels.

Next, similarly to the first loop, a verification operation with respectto an “A” level is performed.

Hereinafter, similarly, writing operations in a third loop and thesubsequent loops are performed. For example, in the third loop,verification operations with respect to “A” and “B” levels areperformed. In this case, first, the verification operation with respectto the “A” level is performed, and data of a latch circuit ADL isupdated using a result of the verification operation. Next, theverification operation with respect to the “B” level is performed, anddata of the latch circuit ADL is further updated using a result of theverification operation. That is, data of the latch circuit ADL may beupdated for each verification operation.

1.5 Effects According to this Embodiment

According to a configuration of this embodiment, it is possible toimprove processing capability. This effect will be described below.

For example, a memory cell transistor MT capable of holding data of fourvalues (2 bits) or more uses a method (selection precharge) ofperforming a verification operation by applying a precharge voltage toonly a bit line BL connected to a memory cell transistor MTcorresponding to a writing level which is a target for a verificationoperation, during a verification operation. In this case, in a senseamplifier unit SAU, the presence or absence of a precharge voltageapplied to a bit line BL is determined on the basis of write data.

In addition, in the sense amplifier unit SAU, a portion (for example,data of 1 bit) of the write data may be held in a latch circuit XDLwhich is used for the transmission and reception of data between thesense amplifier unit SAU and an external controller in order to reducethe number of latch circuits built into the sense amplifier unit.However, when a plurality of sense amplifier units SAU and a pluralityof latch circuits XDL are connected to each other through one bus DBUSin common, the transmission and reception of a signal between the senseamplifier units SAU and the latch circuits XDL are serially performed.For this reason, in many cases, the transmission and reception of databetween the sense amplifier units SAU and the latch circuits XDL maybecome slower than the transmission and reception of a signal between asense amplifier section SA and a latch circuit within the senseamplifier unit SAU.

Accordingly, when a verification operation is performed by selectionprecharge, a latch circuit XDL holding a portion of write data resultsin the necessity for a sense amplifier unit SAU to access the latchcircuit XDL for each verification operation in order to determinewhether to apply a precharge voltage. More specifically, the senseamplifier unit SAU performs an arithmetic operation of data of a latchcircuit within the sense amplifier unit SAU and data of the latchcircuit XDL. In addition, whether to apply a precharge voltage iscontrolled in accordance with a result of the arithmetic operation. Forthis reason, a processing time until the precharge voltage is started tobe applied is increased, and a processing speed of the verificationoperation is reduced.

On the other hand, in the configuration according to this embodiment, inan operation of writing data in a memory cell transistor MT capable ofholding data of four values (2 bits) or more, a latch circuit XDL holdsa portion of the write data. In addition, when a verification operationis performed by selection precharge, a sense amplifier unit SAUdetermines whether to apply a precharge voltage in accordance with datawhich is held in a latch circuit within the sense amplifier unit SAU.Accordingly, access to the latch circuit XDL can be omitted, and thus itis possible to improve a processing speed of a verification operation.Therefore, it is possible to improve the processing capability of thesemiconductor memory device.

Further, in the configuration according to this embodiment, anarithmetic operation is performed using a portion of write data which isheld by a latch circuit within a sense amplifier unit SAU. For example,in data writing of 3 bits (eight values), when the latch circuit withinthe sense amplifier unit SAU holds data of 2 bits, the sense amplifierunit SAU performs an arithmetic operation of the data of 2 bits.Accordingly, the number of bits on which arithmetic processing is to beperformed can be reduced with respect to the number of bits of data tobe written, and thus it is possible to improve a processing speed.Therefore, it is possible to improve the processing capability of thesemiconductor memory device.

Further, in the configuration according to this embodiment, it ispossible to make the number of latch circuits for holding write dataincluded in a sense amplifier unit SAU smaller than the number of bitsof data to be written. Therefore, it is possible to simplify the circuitand to suppress an increase in a chip area.

2. Second Embodiment

Next, a second embodiment will be described. The second embodiment isdifferent from the first embodiment in that a bit line BL having aprecharge voltage applied thereto is determined from arithmeticoperation results of pieces of data which are held in latch circuitsADL, BDL, and CDL in a verification operation. Hereinafter, onlydifferences from the first embodiment will be described.

2.1 Data Held in Latch Circuit SDL in Verification Operation

First, data held in a latch circuit SDL during a verification operationwill be described with reference to FIG. 19.

As shown in the drawing, arithmetic operation results of pieces of datathat are held in latch circuits ADL, BDL, and CDL are stored in thelatch circuit SDL. That is, results corresponding to data of amiddle-order bit which is stored in the latch circuit BLD, data of ahigh-order bit which is stored in the latch circuit CDL, and inverteddata of programming data which is stored in the latch circuit ADL arestored in the latch circuit SDL.

More specifically, in a verification operation with respect to an “A”level, data of a logical arithmetic expression; SDL=/((/ADL)×BDL×(/CDL))is stored in the latch circuit SDL. In a first verification operationwith respect to an “A” level, data of ‘0’ is stored in all latchcircuits ADL corresponding to an “A” level. Accordingly, data of ‘0’ isstored in all latch circuits SDL corresponding to an “A” level. Inaddition, in a second verification operation and the subsequentverification operations with respect to an “A” level, data of ‘0’ isstored in a latch circuit ADL of a sense amplifier unit SAU that failsin the previous verification operation, and data of ‘1’ is stored in alatch circuit ADL of a sense amplifier unit SAU that passes theverification operation. Accordingly, data of ‘0’ is stored in a latchcircuit SDL of the sense amplifier unit SAU that fails in the previousverification operation, and data of ‘1’ is stored in a latch circuit SDLof a sense amplifier unit SAU that passes the verification operation. Inaddition, in a verification operation with respect to an “A” level, dataof ‘1’ is stored in latch circuits SDL corresponding to “Er”, “B” to“E”, and “G” levels, and data of ‘0’ is stored in a latch circuit SDLcorresponding to an “F” level.

In a verification operation with respect to a “B” level, data of alogical arithmetic expression; SDL=M/ADL)×(/BDL)×CDL) is stored in alatch circuit SDL. Accordingly, in a first verification operation withrespect to a “B” level, data of ‘0’ is stored in all latch circuits SDLcorresponding to a “B” level. In addition, in a second verificationoperation and the subsequent verification operations with respect to a“B” level, data of ‘0’ is stored in a latch circuit SDL of a senseamplifier unit SAU that fails in the previous verification operation,and data of ‘1’ is stored in a latch circuit SDL of a sense amplifierunit SAU that passes the verification operation. In addition, in averification operation with respect to a “B” level, data of ‘1’ isstored in latch circuits SDL corresponding to “Er”, “A”, “C”, “D”, “F”,and “G” levels, and data of ‘0’ is stored in a latch circuit SDLcorresponding to an “E” level.

In a verification operation with respect to a “C” level, data of alogical arithmetic expression; SDL=/((/ADL)×(/BDL)×(/CDL)) is stored ina latch circuit SDL. Accordingly, in a first verification operation withrespect to a “C” level, data of ‘0’ is stored in all latch circuits SDLcorresponding to a “C” level. In addition, in a second verificationoperation and the subsequent verification operations with respect to a“C” level, data of ‘0’ is stored in a latch circuit SDL of a senseamplifier unit SAU that fails in the previous verification operation,and data of ‘1’ is stored in a latch circuit SDL of a sense amplifierunit SAU that passes the verification operation. In addition, in averification operation with respect to a “C” level, data of ‘1’ isstored in latch circuits SDL corresponding to “Er” to “B” and “E” to “G”levels, and data of ‘0’ is stored in a latch circuit SDL correspondingto a “D” level.

In a verification operation with respect to a “D” level, data of alogical arithmetic expression; SDL=/((/ADL)×(/BDL)×(/CDL)) which is thesame as that of the “C” level is stored in a latch circuit SDL.Accordingly, in a first verification operation with respect to a “D”level, data of ‘0’ is stored in all latch circuits SDL corresponding toa “D” level. In addition, in a second verification operation and thesubsequent verification operations with respect to a “D” level, data of‘0’ is stored in a latch circuit SDL of a sense amplifier unit SAU thatfails in the previous verification operation, and data of ‘1’ is storedin a latch circuit SDL of a sense amplifier unit SAU that passes theverification operation. In addition, in a verification operation withrespect to a “D” level, data of ‘1’ is stored in latch circuits SDLcorresponding to “Er” to “C” and “E” to “G” levels. More specifically,regarding “C” and “D” levels, pieces of data having the same value arestored in latch circuits BDL and CDL, but data of ‘1’ is stored in alatch circuit ADL corresponding to a “C” level in a verificationoperation with respect to a “D” level. For this reason, data of ‘1’ isstored in a latch circuit SDL corresponding to a “C” level.

In a verification operation with respect to an “E” level, data of alogical arithmetic expression; SDL=/((/ADL)×(/BDL)×CDL) which is thesame as that of the “B” level is stored in a latch circuit SDL.Accordingly, in a first verification operation with respect to an “E”level, data of ‘0’ is stored in all latch circuits SDL corresponding toan “E” level. In addition, in a second verification operation and thesubsequent verification operations with respect to an “E” level, data of‘0’ is stored in a latch circuit SDL of a sense amplifier unit SAU thatfails in the previous verification operation, and data of ‘1’ is storedin a latch circuit SDL of a sense amplifier unit SAU that passes theverification operation. In addition, in a verification operation withrespect to an “E” level, data of ‘1’ is stored in latch circuits SDLcorresponding to “Er” to “D”, “F”, and “G” levels.

In a verification operation with respect to an “F” level, data of alogical arithmetic expression; SDL=/((/ADL)×BDL×(/CDL)) which is thesame as that of the “A” level is stored in a latch circuit SDL.Accordingly, in a first verification operation with respect to an “F”level, data of ‘0’ is stored in all latch circuits SDL corresponding toan “F” level. In addition, in a second verification operation and thesubsequent verification operations with respect to an “F” level, data of‘0’ is stored in a latch circuit SDL of a sense amplifier unit SAU thatfails in the previous verification operation, and data of ‘1’ is storedin a latch circuit SDL of a sense amplifier unit SAU that passes theverification operation. In addition, in a verification operation withrespect to an “F” level, data of ‘1’ is stored in latch circuits SDLcorresponding to “Er” to “E” and “G” levels.

In a verification operation with respect to a “G” level, data of alogical arithmetic expression; SDL=/((/ADL)×BDL×CDL) is stored in alatch circuit SDL. Accordingly, in a first verification operation withrespect to a “G” level, data of ‘0’ is stored in all latch circuits SDLcorresponding to a “G” level. In addition, in a second verificationoperation and the subsequent verification operations with respect to a“G” level, data of ‘0’ is stored in a latch circuit SDL of a senseamplifier unit SAU that fails in the previous verification operation,and data of ‘1’ is stored in a latch circuit SDL of a sense amplifierunit SAU that passes the verification operation. In addition, in averification operation with respect to a “G” level, data of ‘1’ isstored in latch circuits SDL corresponding to “Er” to “F” levels.

2.2 Specific Example of Writing Operation

A writing operation of this embodiment will be described morespecifically. A combination of a programming operation and averification operation in this embodiment is the same as those in FIGS.13 and 14 of the first embodiment.

FIG. 20 shows the state of a potential of each wiring in thisembodiment. FIG. 20 shows changes over time in a potential of a selectedword line WL, potentials of bit lines BL (“Er”) to BL (“G”), and apotential of a signal STB in a sense amplifier unit SAU in first tothird, seventh, and eleventh loops.

As shown in the drawing, a programming operation and a verificationoperation in the first loop are the same as those in FIG. 15 of thefirst embodiment.

In the second loop, a programming of ‘0’ operation is performed on thebit line BL (“A”) and the bit lines BL (“B”) to BL (“G”) that fail in afirst verification operation with respect to an “A” level. Next, theverification operation with respect to an “A” level is executed. At thistime, a precharge voltage VPCH (for example, 0.5 V) is applied to thebit line BL (“A”) and the bit line BL (“F”) that fail in theverification operation with respect to an “A” level of the first loop.

Similarly to the second loop, in the third loop, programming of ‘0’ isperformed on the bit line BL (“A”) and the bit lines BL (“B”) to BL(“G”) that fail in the verification operation with respect to an “A”level. Next, similarly to the second loop, first, a verificationoperation with respect to an “A” level is executed. At this time, aprecharge voltage VPCH (for example, 0.5 V) is applied to the bit lineBL (“A”) and the bit line BL (“F”) that fail in the verificationoperation with respect to an “A” level in the second loop. Next, averification operation with respect to a “B” level is executed. At thistime, a precharge voltage VPCH (for example, 0.5 V) is applied to thebit lines BL (“B”) and BL (“E”).

The same process is repeated, and programming of ‘0’ is performed on thebit lines BL (“B”) and BL (“C”) and the bit lines BL (“D”) to BL (“G”)that fail in verification, in the seventh loop. Next, verificationoperations with respect to (“B”) to (“D”) levels are sequentiallyperformed. In the verification operation with respect to a “B” level, aprecharge voltage VPCH (for example, 0.5 V) is applied to the bit lineBL (“B”) and the bit line BL (“E”) that fail in the verificationoperation with respect to a “B” level in the sixth loop. In theverification operation with respect to a “C” level, a precharge voltageVPCH (for example, 0.5 V) is applied to the bit lines BL (“C”) and BL(“D”) that fail in the verification operation with respect to a “C”level in the sixth loop. In the verification operation with respect to a“D” level, a precharge voltage VPCH (for example, 0.5 V) is applied tothe bit line BL (“D”).

In addition, in the eleventh loop, programming of ‘0’ is performed onthe bit lines BL (“D”) and BL (“E”) and the bit lines BL (“F”) and BL(“G”) that fail in verification. Next, verification operations withrespect to (“D”) to (“F”) levels are performed. In the verificationoperation with respect to a “D” level, a precharge voltage VPCH (forexample, 0.5 V) is applied to the bit line BL (“D”) that fails in theverification operation with respect to a “D” level in the tenth loop. Inthe verification operation with respect to an “E” level, a prechargevoltage VPCH (for example, 0.5 V) is applied to the bit line BL (“E”)that fails in the verification operation with respect to an “E” level inthe tenth loop. In the verification operation with respect to an “F”level, a precharge voltage VPCH (for example, 0.5 V) is applied to thebit line BL (“F”).

As described above, for example, focusing on the bit lines BL (“A”) andBL (“F”), a precharge voltage VPCH is applied to the bit line BL (“A”)in the first to sixth loops in which a verification operation withrespect to an “A” level is performed. However, in the second to sixthloops, a precharge voltage VPCH is applied to the bit line BL (“A”) thatfails in the previous verification operation with respect to an “A”level.

A precharge voltage VPCH is applied to the bit line (“F”) in the firstto sixth loops in which a verification operation with respect to an “A”level is performed and in eleventh to sixteenth loops in which averification operation with respect to an “F” level is performed.However, in twelfth to sixteenth loops, a precharge voltage VPCH isapplied to the bit line BL (“F”) that fails in the previous verificationoperation with respect to an “F” level.

2.3 Effects According to this Embodiment

In the configuration according to this embodiment, it is possible toobtain the same effects as those in the first embodiment.

Further, in the configuration according to this embodiment, with regardto a bit line BL that passes a verification operation, a prechargevoltage is not applied to the bit line BL in the next verificationoperation and the subsequent verification operations. Therefore, it ispossible to reduce the power consumption of the semiconductor memorydevice.

3. Modification Example and the Like

The semiconductor memory device according to the above-describedembodiment includes a first memory cell (MT in FIG. 2) which is capableof being set to any of at least four threshold voltages, a first bitline (BL (“A”) in FIG. 15) which is connected to the first memory cell,a word line (selected WL in FIG. 15) which is connected to a gate of thefirst memory cell, and a first sense amplifier (SAU in FIG. 5) which isconnected to the first bit line. After a programming operation ofwriting data in the first memory cell is performed, a verificationoperation of verifying the threshold voltage of the first memory cell isperformed. In a first verification operation (first loop in FIG. 15) inwhich a first voltage (VfyA in FIG. 15) is applied to the word line, afirst sense amplifier applies a charging voltage (VPCH in FIG. 15) tothe first bit line. In a second verification operation (“B” verificationin a third loop in FIG. 15) in which a second voltage (VfyB in FIG. 15)higher than the first voltage is applied to the word line, the firstsense amplifier does not apply the charging voltage to the first bitline. In a third verification operation (“F” verification in an eleventhloop in FIG. 15) in which a third voltage (VfyF in FIG. 15) higher thanthe second voltage is applied to the word line, the first senseamplifier applies the charging voltage to the first bit line.

It is possible to provide the semiconductor memory device capable ofimproving processing capability by applying the above-describedembodiment. Meanwhile, the embodiment is not limited to theabove-described mode, and various modifications can be made thereto.

For example, in the above-described embodiment, a voltage sensing typesense amplifier may be used.

Further, in the above-described embodiment, an AND operation and an ORoperation that use a sense amplifier section SA are described, but thecontrol of a transistor during an arithmetic operation is not limited tothat described above. For example, the taking-up of pieces of data fromlatch circuits BDL and CDL to a bus LBUS in steps 1 and 3 of FIG. 7 maybe simultaneously performed.

Further, the exemplary embodiment can also be applied to athree-dimensional stacked NAND-type flash memory or a flat type or aflat NAND-type flash memory which is different from that in theabove-described embodiment. Further, the exemplary embodiment can alsobe applied to a semiconductor memory device using a storage elementcapable of holding data of four values (2 bits) or more without beinglimited to the NAND-type flash memory.

Further, the term “connection” in the above-described embodiment alsoincludes a state where indirect connection is made through anything elsesuch as a transistor or a resistor.

Meanwhile, the embodiments related to the exemplary embodiment may beimplemented as follows. For example, when a memory cell transistor MTcan hold data of 2 bits (four values) and threshold value levels at thetime of holding any of the four values are set to be an E level (erasurelevel), an A level, a B level, and a C level in ascending order,

(1) a voltage applied to a word line selected for a read-out operationof an A level is in a range of, for example, 0 V to 0.55 V in a read-outoperation. The exemplary embodiment is not limited thereto, and thevoltage may be in any of ranges of 0.1 V to 0.24 V, 0.21 V to 0.31 V,0.31 V to 0.4 V, 0.4 V to 0.5 V, and 0.5 V to 0.55 V.

A voltage applied to a word line selected for a read-out operation of aB level is in a range of, for example, 1.5 V to 2.3 V. The exemplaryembodiment is not limited thereto, and the voltage may be in any ofranges of 1.65 V to 1.8 V, 1.8 V to 1.95 V, 1.95 V to 2.1 V, and 2.1 Vto 2.3 V.

A voltage applied to a word line selected for a read-out operation of aC level is in a range of, for example, 3.0 V to 4.0 V. The exemplaryembodiment is not limited thereto, and the voltage may be in any ofranges of 3.0 V to 3.2 V, 3.2 V to 3.4 V, 3.4 V to 3.5 V, 3.5 V to 3.6V, and 3.6 V to 4.0 V.

A time (tR) of the read-out operation may be in a range of, for example,25 μs to 38 μs, 38 μs to 70 μs, or 70 μs to 80 μs.

(2) A writing operation includes a programming operation and averification operation as described above. In the writing operation, avoltage which is first applied to a word line selected during aprogramming operation is in a range of, for example, 13.7 V to 14.3 V.The exemplary embodiment is not limited thereto, and the voltage may bein any of ranges of, for example, 13.7 V to 14.0 V and 14.0 V to 14.6 V.

A voltage which is first applied to a selected word line at the time ofwriting an odd-numbered word line and a voltage which is first appliedto a selected word line at the time of writing an even-numbered wordline may be changed.

When a programming operation is set to be an incremental step pulseprogram (ISPP) method, for example, approximately 0.5 V is adopted as astep-up voltage.

A voltage applied to a non-selected word line may be in a range of, forexample, 6.0 V to 7.3 V. The exemplary embodiment is not limitedthereto, and the voltage may be in a range of, for example, 7.3 V to 8.4V or may be equal to or less than 6.0 V.

A path voltage to be applied may be changed according to whether anon-selected word line is an odd-numbered word line or an even-numberedword line.

A time (tProg) of the writing operation may be in any of ranges of, forexample, 1700 μs to 1800 μs, 1800 μs to 1900 μs, and 1900 μs to 2000 μs.

(3) In an erasure operation, a voltage which is first applied to a wellwhich is disposed on a semiconductor substrate and has theabove-mentioned memory cells disposed thereon is in a range of, forexample, 12 V to 13.6 V. The exemplary embodiment is not limitedthereto, and the voltage may be in a range of, for example, 13.6 V to14.8 V, 14.8 V to 19.0 V, 19.0 to 19.8 V, or 19.8 V to 21 V.

A time (tErase) of the erasure operation may be in a range of, forexample, 3000 μs to 4000 μs, 4000 μs to 5000 μs, or 4000 μs to 9000 μs.

(4) A structure of a memory cell includes a charge storage layer whichis disposed on a semiconductor substrate (silicon substrate) through atunnel insulating film having a film thickness of 4 nm to 10 nm. Thecharge storage layer can be configured to have a structure in which aninsulating film such as SiN having a film thickness of 2 nm to 3 nm orSiON, and a polysilicon film having a film thickness of 3 nm to 8 nm arestacked. In addition, a metal such as Ru may be added to the polysiliconfilm. An insulating film is provided on the charge storage layer. Theinsulating film includes a silicon oxide film having a film thickness of4 nm to 10 nm which is interposed between a lower High-k film having afilm thickness of 3 nm to 10 nm and an upper High-k film having a filmthickness of 3 nm to 10 nm. Examples of a material of the High-k filminclude HfO and the like. In addition, the film thickness of the siliconoxide film can be larger than the film thickness of the High-k film. Acontrol electrode having a film thickness of 30 nm to 70 nm is providedon the insulating film through a material having a film thickness of 3nm to 10 nm. Here, such material is a metal oxide film such as TaO or ametal nitride film such as TaN. In addition, W or the like can be usedfor the control electrode.

In addition, an air gap can be formed between memory cells.

While certain embodiments have been described, these embodiments havebeen presented by way of example only, and are not intended to limit thescope of the inventions. Indeed, the novel embodiments described hereinmay be embodied in a variety of other forms; furthermore, variousomissions, substitutions and changes in the form of the embodimentsdescribed herein may be made without departing from the spirit of theinventions. The accompanying claims and their equivalents are intendedto cover such forms or modifications as would fall within the scope andspirit of the inventions.

What is claimed is:
 1. A semiconductor memory device comprising: a firstmemory cell which is capable of being set to any one of at least fourthreshold voltages; a first bit line which is connected to the firstmemory cell; a word line which is connected to a gate of the firstmemory cell; and a first sense amplifier which is connected to the firstbit line, wherein a verification operation of verifying the thresholdvoltage of the first memory cell is performed after a programmingoperation of writing data in the first memory cell is performed, whereinin a first verification operation in which a first voltage is applied tothe word line, the first sense amplifier applies a charging voltage tothe first bit line, wherein in a second verification operation in whicha second voltage higher than the first voltage is applied to the wordline, the first sense amplifier does not apply the charging voltage tothe first bit line, and wherein in a third verification operation inwhich a third voltage higher than the second voltage is applied to theword line, the first sense amplifier applies the charging voltage to thefirst bit line.
 2. The device according to claim 1, further comprising:a second memory cell which is capable of being set to one of the atleast four threshold voltages; a second bit line which is connected tothe second memory cell; and a second sense amplifier which is connectedto the second bit line, wherein in the first verification operation, thesecond sense amplifier does not apply the charging voltage to the secondbit line, wherein in the second verification operation, the second senseamplifier applies the charging voltage to the second bit line, andwherein in the third verification operation, the second sense amplifierdoes not apply the charging voltage to the second bit line.
 3. Thedevice according to claim 2, wherein the first verification operationcorresponds to a programming operation of first data, wherein the secondverification operation corresponds to a programming operation of seconddata different from the first data, wherein the third verificationoperation corresponds to a programming operation of third data differentfrom the first data and the second data, and wherein in the programmingoperation of writing the data in the first memory cell, one of the firstdata and the third data is written in the first memory cell, and thesecond data is written in the second memory cell.
 4. The deviceaccording to claim 1, wherein the first verification operationcorresponds to a programming operation of first data, wherein the secondverification operation corresponds to a programming operation of seconddata different from the first data, wherein the third verificationoperation corresponds to a programming operation of third data differentfrom the first data and the second data, and wherein in the programmingoperation of writing the data in the first memory cell, one of the firstdata and the third data is written in the first memory cell.
 5. Thedevice according to claim 4, wherein the programming operation iscarried out in a plurality of loops and each of the first, second, andthird verification operations follows one of the programming operations.6. The device according to claim 5, wherein a programming voltage isincreased in each subsequent loop.
 7. The device according to claim 6,wherein the second verification operation is carried out after the firstverification operation and the third verification operation is carriedout after the second verification operation.
 8. The device according toclaim 1, wherein the first sense amplifier includes first and secondlatch circuits, and the first, second, and third verifications arecarried out using information held in the first latch circuit but notinformation held in the second latch circuit.
 9. A semiconductor memorydevice comprising: first and second memory cells which are capable ofbeing set to any one of at least four threshold voltages; first andsecond bit lines which are connected to the first and second memorycells, respectively; a word line which is connected to gates of thefirst and second memory cells in common; a first sense amplifier whichis connected to the first bit line; and a second sense amplifier whichis connected to the second bit line, wherein a verification operation ofverifying threshold voltages of the first and second memory cells isperformed after a programming operation of writing data in the first andsecond memory cells is performed, wherein when first data is written inthe first memory cell and second data different from the first data iswritten in the second memory cell, wherein, in a first verificationoperation corresponding to the first data, a first voltage is applied tothe word line, and the first and second sense amplifiers apply acharging voltage to the first and second bit lines, wherein, in a secondverification operation corresponding to the second data, a secondvoltage higher than the first voltage is applied to the word line, thesecond sense amplifier applies the charging voltage to the second bitline, and the first sense amplifier does not apply the charging voltageto the second bit line, and wherein, in a third verification operationcorresponding to third data different from the first data and the seconddata, a third voltage higher than the second voltage is applied to theword line, and the first and second sense amplifiers do not apply thecharging voltage to the first and second bit lines.
 10. The deviceaccording to claim 9, wherein the programming operation is carried outin a plurality of loops and each of the first, second, and thirdverification operations follows one of the programming operations. 11.The device according to claim 10, wherein a programming voltage isincreased in each subsequent loop.
 12. The device according to claim 11,wherein the second verification operation is carried out after the firstverification operation and the third verification operation is carriedout after the second verification operation.
 13. The device according toclaim 9, wherein each of the first and second sense amplifiers includesfirst and second latch circuits, and the verifications are carried outusing information held in the first latch circuit but not informationheld in the second latch circuit.
 14. A semiconductor memory devicecomprising: a first memory cell which is capable of being set to any oneof at least four threshold voltages; a first bit line which is connectedto the first memory cell; a word line which is connected to a gate ofthe first memory cell; a first sense amplifier which is connected to thefirst bit line and includes a first latch circuit; and a second latchcircuit which is connected to the first sense amplifier through aswitching element, wherein a verification operation of verifying thethreshold voltage of the first memory cell is performed after aprogramming operation of writing data in the first memory cell isperformed, wherein in the programming operation, the first latch circuitholds first information of the data, and the second latch circuit holdssecond information of the data which is different from the firstinformation, and wherein in the verification operation, the first senseamplifier applies a charging voltage to the first bit line in accordancewith the first information which is held in the first latch circuit,without using the second information which is held in the second latchcircuit.
 15. The device according to claim 14, wherein in theverification operation, the switching element is maintained in the offstate until the application of the charging voltage to the first bitline is started.
 16. The device according to claim 15, wherein the firstmemory cell is capable of being set to any one of eight thresholdvoltages and the first information corresponds to upper or middle pagedata, and the second information corresponds to lower page data.
 17. Thedevice according to claim 16, wherein the first sense amplifier furtherincludes third and fourth latch circuits, the third latch circuitholding upper or middle page data and the fourth latch circuit holdingverification pass/fail information.
 18. The device according to claim17, wherein the first sense amplifier includes a fifth latch circuit,the fifth latch circuit holding results of arithmetic operationsperformed on information held in one or more of the first, third, andfourth latch circuits.